Nanoporosity of Si (100) bars

Resumo

Si(100) samples cut from a typical bar (100 mm in diameter) prepared using industrial technology are studied. Measurements of the electron work function (EWF) show that the size effects in these samples (a reduction in thickness along with a sample’s area and the EWF) detected earlier were due to nanostructure porosity that was buried by the technological treatment of a bar’s surface. This hidden nanoporosity is assumed to be a manifestation of the secondary crystal structure.