Features of the Auger spectra of Ti2C, SiC, and WC

Abstract

The features of variations in the structure of Auger peaks characterizing titanium, tungsten and silicon carbide elements are revealed via Auger-electron spectroscopy and the main spectral distinctions of carbide phases (changes in shape, position, and intensity of Auger peaks), which provide an opportunity to analyze the chemical state of elements, are determined. The integrated and differentiated forms of Auger spectra from carbides and their constituent elements are compared. The new relative elemental sensitivity coefficients (RESCs) of carbide elements are ascertained with the help of Ti₂C, SiC, and WC reference samples since the standard RESCs give significant deviations in the composition.