Organization of the Post-Discharge Mode under Pulsed Ion-Plasma Treatment

Abstract

The post-discharge processes in the electrical supply circuit of a technological system with a pulsed glow discharge used for the ion-plasma treatment of materials are analyzed, in which a direct current glow discharge is maintained in the pauses between the treatment pulses. The variants of connecting a pulse generator through a separating capacitor or a separating diode are considered and the formulas for determining the time parameters of the recovery process of the direct-current discharge after the end of the treatment pulses are obtained. Recommendations for organizing the electric mode for fast recovery of the direct-current discharge are given, as well as for preventing arc discharge at the negative electrode and extinguishing the arc if it appears.