Enviar artigo por via de e-mail In-process monitoring of shape accuracy of flat surfaces of optical and microelectronic components in polishing
- Autores: Filatov Y.D.1, Sidorko V.I.1, Kovalev S.V.1, Filativ O.Y.1, Monteil G.2
-
Afiliações:
- Bakul Institute for Superhard Materials
- École Nationale Supérieure de Mécanique et des Microtechniques
- Edição: Volume 39, Nº 4 (2017)
- Páginas: 282-287
- Seção: Investigation of Machining Processes
- URL: https://journal-vniispk.ru/1063-4576/article/view/185935
- DOI: https://doi.org/10.3103/S1063457617040086
- ID: 185935
Citar
Acesso aberto
Acesso está concedido
Somente assinantes
Resumo
The in-process monitoring of surface shape of optical surfaces directly in the course of polishing is demonstrated to be accomplished through the confocal chromatic imaging technology. A linear relationship has been found between the deviation from square waveform and the variation of the workpiece surface shape.
Palavras-chave
Sobre autores
Yu. Filatov
Bakul Institute for Superhard Materials
Autor responsável pela correspondência
Email: filatov@ism.kiev.ua
Ucrânia, vul. Avtozavods’ka 2, Kiev, 04074
V. Sidorko
Bakul Institute for Superhard Materials
Email: filatov@ism.kiev.ua
Ucrânia, vul. Avtozavods’ka 2, Kiev, 04074
S. Kovalev
Bakul Institute for Superhard Materials
Email: filatov@ism.kiev.ua
Ucrânia, vul. Avtozavods’ka 2, Kiev, 04074
O. Filativ
Bakul Institute for Superhard Materials
Email: filatov@ism.kiev.ua
Ucrânia, vul. Avtozavods’ka 2, Kiev, 04074
G. Monteil
École Nationale Supérieure de Mécanique et des Microtechniques
Email: filatov@ism.kiev.ua
França, 26, rue de l’épitaphe CS 51813, Besançon, 25030
Arquivos suplementares
