Properties of coatings of the Al–Cr–Fe–Co–Ni–Cu–V high entropy alloy produced by the magnetron sputtering

详细

It has been found that coatings from an Al–Fe–Co–Ni–Cu–Cr–V high entropy equiatomic alloy produced by the magnetron sputtering have nanocrystalline microstructures, are textured, and present a solid two-phase solution, which crystallizes in the bcc (a = 2.91 Å) and fcc (a = 3.65 Å) phases. The ion bombardment of a growing coating caused by the bias voltage (0–(–200) V), which has been applied to the substrate, decreases the growth rate of a condensate and affects its composition and structure. It has been shown that the composition of coatings deposited without an ion bombardment coincides with the target composition, whereas an increase of the ion bombardment intensity leads to the depletion of the coating composition in Al, Cu, and Ni and increase the microhardness. The anisotropy of the coating produced has been revealed.