Email this article Spatial distribution of the electron component parameters in the nitrogen plasma of a low-pressure electrode microwave Discharge
- Authors: Lebedev Y.A.1, Krashevskaya G.V.1,2, Gogoleva M.A.1
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Affiliations:
- Topchiev Institute of Petrochemical Synthesis
- National Research Nuclear University Moscow Engineering Physics Institute
- Issue: Vol 42, No 1 (2016)
- Pages: 100-103
- Section: Applied Physics
- URL: https://journal-vniispk.ru/1063-780X/article/view/185573
- DOI: https://doi.org/10.1134/S1063780X16010098
- ID: 185573
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Abstract
Spatial distributions of charged particle concentration, electron temperature, and DC potential in an electrode microwave discharge in nitrogen at a pressure of 1 Torr have been measured using the double electric probe method. It has been shown that, near the electrode/antenna, the charged particle concentration exceeds a critical value. The concentration and heterogeneity of the discharge increase with increasing microwave power.
About the authors
Yu. A. Lebedev
Topchiev Institute of Petrochemical Synthesis
Author for correspondence.
Email: lebedev@ips.ac.ru
Russian Federation, Leninskii pr. 29, Moscow, 119991
G. V. Krashevskaya
Topchiev Institute of Petrochemical Synthesis; National Research Nuclear University Moscow Engineering Physics Institute
Email: lebedev@ips.ac.ru
Russian Federation, Leninskii pr. 29, Moscow, 119991; Kashirskoe sh. 31, Moscow, 115409
M. A. Gogoleva
Topchiev Institute of Petrochemical Synthesis
Email: lebedev@ips.ac.ru
Russian Federation, Leninskii pr. 29, Moscow, 119991
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