Erratum to: Investigation of the Helicon Discharge Plasma Parametersin a Hybrid RF Plasma System

A. F. Aleksandrov; A. K. Petrov; K. V. Vavilin; E. A. Kralkina; P. A. Neklyudova; A. M. Nikonov; V. B. Pavlov; A. A. Ayrapetov; V. V. Odinokov; V. A. Sologub; G. Ya. Pavlov

doi:10.1134/S1063780X17130013

Erratum to: Investigation of the Helicon Discharge Plasma Parametersin a Hybrid RF Plasma System

作者: Aleksandrov A.F.¹, Petrov A.K.¹, Vavilin K.V.¹, Kralkina E.A.¹, Neklyudova P.A.¹, Nikonov A.M.¹, Pavlov V.B.¹, Ayrapetov A.A.², Odinokov V.V.², Sologub V.A.², Pavlov G.Y.²
隶属关系:
1. Faculty of Physics
2. Research Institute of Precision Engineering
期: 卷 43, 编号 12 (2017)
页面: 1208-1208
栏目: Erratum
URL: https://journal-vniispk.ru/1063-780X/article/view/186342
DOI: https://doi.org/10.1134/S1063780X17130013
ID: 186342

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The following must be added at the end of Acknowledgments:

The study by JSC Research Institute of Precision Machine Manufacturing was supported by the Ministry of Education and Science of the Russian Federation, Agreement no. 14.576.21.0021 dated June 30, 2014. The unique identifier of this applied research project is RFMEF157614X0021.