作者的详细信息

Rudenko, K. V.

期	栏目	标题	文件
卷 63, 编号 2 (2018)	Physics of Nanostructures	Analytical Model of Atomic Layer Deposition of Films on 3D Structures with High Aspect Ratios
卷 63, 编号 8 (2018)	Physical Electronics	Analytical Model for Atomic-Layer Deposition of Thin Films on the Walls of Cylindrical Holes with a Relatively High Aspect Ratio
卷 63, 编号 10 (2018)	Physical Electronics	Atomic Layer Deposition of Thin Films onto 3D Nanostructures: The Effect of Wall Tilt Angle and Aspect Ratio of Trenches