Автор туралы ақпарат
Rudenko, K. V.
| Шығарылым | Бөлім | Атауы | Файл |
| Том 63, № 2 (2018) | Physics of Nanostructures | Analytical Model of Atomic Layer Deposition of Films on 3D Structures with High Aspect Ratios | |
| Том 63, № 8 (2018) | Physical Electronics | Analytical Model for Atomic-Layer Deposition of Thin Films on the Walls of Cylindrical Holes with a Relatively High Aspect Ratio | |
| Том 63, № 10 (2018) | Physical Electronics | Atomic Layer Deposition of Thin Films onto 3D Nanostructures: The Effect of Wall Tilt Angle and Aspect Ratio of Trenches |