Transformation parametric structures of nano- and micromotors with longitudinal piezo effect


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A structural–parametric model of a piezo motor is formulated by solving the wave equation. The influence of geometric and physical parameters and external loads on its static and dynamic characteristics in the control system is studied. Transfer functions are derived for piezo motors used in nanodrives. The parametric structure of the piezo motor is determined and transformed.

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S. Afonin

National Research University of Electronic Technology (Moscow Institute of Electronic Technology MIET)

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Email: eduems@mail.ru
俄罗斯联邦, Moscow

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