Email this article Influence of the parameters of plasma-induced decomposition of tetramethylsilane on the chemical and phase compositions and particle size of resulting silicon carbide
- Authors: Berestenko V.I.1, Kurkin E.N.2, Torbov V.I.1, Domashnev I.A.2
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Affiliations:
- Institute of Problems of Chemical Physics
- Scientific Center
- Issue: Vol 50, No 3 (2016)
- Pages: 221-223
- Section: Short Communications Plasma Chemistry
- URL: https://journal-vniispk.ru/0018-1439/article/view/156974
- DOI: https://doi.org/10.1134/S0018143916030036
- ID: 156974
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About the authors
V. I. Berestenko
Institute of Problems of Chemical Physics
Author for correspondence.
Email: vib@icp.ac.ru
Russian Federation, Chernogolovka, Moscow oblast
E. N. Kurkin
Scientific Center
Email: vib@icp.ac.ru
Russian Federation, Chernogolovka, Moscow oblast
V. I. Torbov
Institute of Problems of Chemical Physics
Email: vib@icp.ac.ru
Russian Federation, Chernogolovka, Moscow oblast
I. A. Domashnev
Scientific Center
Email: vib@icp.ac.ru
Russian Federation, Chernogolovka, Moscow oblast
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