Features of germanium tetrafluoride reduction with hydrogen in inductively and capacitively coupled radiofrequency discharges
- Authors: Kornev R.A.1, Sennikov P.G.1, Konychev D.A.1
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Affiliations:
- Institute of Chemistry of High-Purity Substances
- Issue: Vol 51, No 1 (2017)
- Pages: 56-59
- Section: Plasma Chemistry
- URL: https://journal-vniispk.ru/0018-1439/article/view/157109
- DOI: https://doi.org/10.1134/S0018143916060072
- ID: 157109
Cite item
Abstract
The process of plasma-chemical conversion of germanium tetrafluoride in a radiofrequency discharge (13.56 MHz) has been studied. The dependences of the germanium yield on the specific energy input, the H2/GeF4 molar ratio, and the total pressure have been measured. The maximum germanium yield is more than 95%. The minimum specific energy consumption at an energy input of 9 MJ/mol is 9.4 MJ/mol or 2.6 kW h/mol Ge. A mechanism of plasma-assisted reduction of germanium tetrafluoride under the given the experimental conditions has been proposed.
About the authors
R. A. Kornev
Institute of Chemistry of High-Purity Substances
Author for correspondence.
Email: kornev@ihps.nnov.ru
Russian Federation, Nizhny Novgorod, 603950
P. G. Sennikov
Institute of Chemistry of High-Purity Substances
Email: kornev@ihps.nnov.ru
Russian Federation, Nizhny Novgorod, 603950
D. A. Konychev
Institute of Chemistry of High-Purity Substances
Email: kornev@ihps.nnov.ru
Russian Federation, Nizhny Novgorod, 603950
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