Features of germanium tetrafluoride reduction with hydrogen in inductively and capacitively coupled radiofrequency discharges


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Abstract

The process of plasma-chemical conversion of germanium tetrafluoride in a radiofrequency discharge (13.56 MHz) has been studied. The dependences of the germanium yield on the specific energy input, the H2/GeF4 molar ratio, and the total pressure have been measured. The maximum germanium yield is more than 95%. The minimum specific energy consumption at an energy input of 9 MJ/mol is 9.4 MJ/mol or 2.6 kW h/mol Ge. A mechanism of plasma-assisted reduction of germanium tetrafluoride under the given the experimental conditions has been proposed.

About the authors

R. A. Kornev

Institute of Chemistry of High-Purity Substances

Author for correspondence.
Email: kornev@ihps.nnov.ru
Russian Federation, Nizhny Novgorod, 603950

P. G. Sennikov

Institute of Chemistry of High-Purity Substances

Email: kornev@ihps.nnov.ru
Russian Federation, Nizhny Novgorod, 603950

D. A. Konychev

Institute of Chemistry of High-Purity Substances

Email: kornev@ihps.nnov.ru
Russian Federation, Nizhny Novgorod, 603950

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