General features of interaction between copper and chlorine-containing gases

A. V. Dunaev; D. V. Sitanov; D. B. Murin

doi:10.1134/S0018143917030031

General features of interaction between copper and chlorine-containing gases

Authors: Dunaev A.V.¹, Sitanov D.V.¹, Murin D.B.¹
Affiliations:
1. Ivanovo State University of Chemistry and Technology
Issue: Vol 51, No 3 (2017)
Pages: 224-228
Section: Plasma Chemistry
URL: https://journal-vniispk.ru/0018-1439/article/view/157194
DOI: https://doi.org/10.1134/S0018143917030031
ID: 157194

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Abstract

The interaction of copper with chlorine-containing gases has been studied. The resulting kinetic relationships are linear, indicating that the process occurs in a steady-state mode. It has been found that biases of −61 and −107 W provide energy of ions sufficient to maintain the effective rate of ion-stimulated desorption of the reaction products. The surface quality of the treated samples has been analyzed using atomic force microscopy.