Comparative Study of Gas-Dynamic Processes in Inductively Coupled Argon–Hydrogen Plasma Containing Boron Trichloride and Boron Trifluoride

Abstract

A procedure for simulating gas-dynamic and thermal conditions during the conversion in a radiofrequency induction (RFI) plasma reactor has been developed. The model includes a turbulent flow of a mixture of ideal viscous compressible gases, taking into account inductive heating of the gas through heat conduction, convection, and radiation, considering the effect of the electromagnetic field force on the plasma motion. The formation of powder particles agrees with the results of thermodynamic calculations; the distribution of particles in the flow is described by the diffusion mechanism. The results of the simulation of the conversion of volatile boron chloride and boron fluoride in an RFI plasma torch with vortex-stabilized flow are presented.