Effect of Gas Dynamic Conditions in Plasma Reactor on Efficiency of Boron and Silicon Synthesis in Inductively Coupled Argon–Hydrogen Plasma

Abstract

A thermal/gas dynamic model of the plasma-assisted method for producing boron and silicon carbides is proposed. The turbulent flow of a mixture of ideal viscous compressible gases is considered taking into account inductive heating and the influence of the electromagnetic field strength on the plasma motion. The composition of the conversion products is determined in accordance with the results of thermodynamic calculations, while taking into account the influence of the main synthesis products on the temperature field and gas dynamic flow in the reactor. The distribution of powder particles of the desired synthesis products in the stream is described by the diffusion mechanism. The possibilities of synthesis of boron and silicon carbides from their fluorides in a radiofrequency induction plasma torch with vortex flow stabilization have been explored.