Email this article FEATURES OF VISUALIZATION OF THE THREE-DIMENSIONAL STRUCTURE OF MESOPOROUS PZT FILMS BY FIB-SEM NANOTOMOGRAPHY
- Authors: Atanova A.V.1, Khmelenin D.N.1, Zhigalina O.M.1,2
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Affiliations:
- Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,”Russian Academy of Sciences, Moscow, 119333 Russia
- Bauman Moscow State Technical University, Moscow, 107005 Russia
- Issue: Vol 68, No 1 (2023)
- Pages: 105-114
- Section: ПОВЕРХНОСТЬ, ТОНКИЕ ПЛЕНКИ
- URL: https://journal-vniispk.ru/0023-4761/article/view/137377
- DOI: https://doi.org/10.31857/S0023476123010046
- EDN: https://elibrary.ru/DMYHLV
- ID: 137377
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Abstract
A technique for studying the three-dimensional structure of porous lead zirconate titanate films by FIB-SEM-nanotomography is presented. Such quantitative characteristics as total porosity, specific surface area, and actual pore size (calculated using the local thickness method) have been obtained. According to the FIB-SEM-nanotomography data, the pore size is 77 ± 33 nm for the film with the PVP porogen and only 27 ± 6 nm for the film with the Brij76 porogen; the latter value is close to the limiting resolution for this method. The final 3D model is shown to be strongly influenced by the chosen ion-beam parameters during milling, which can be varied to obtain a structure without distortion or visualize the accumulation of pores at grain boundaries.
About the authors
A. V. Atanova
Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,”Russian Academy of Sciences, Moscow, 119333 Russia
Email: atanova.a@crys.ras.ru
Россия, Москва
D. N. Khmelenin
Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,”Russian Academy of Sciences, Moscow, 119333 Russia
Email: atanova.a@crys.ras.ru
Россия, Москва
O. M. Zhigalina
Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics,”Russian Academy of Sciences, Moscow, 119333 Russia; Bauman Moscow State Technical University, Moscow, 107005 Russia
Author for correspondence.
Email: atanova.a@crys.ras.ru
Россия, Москва; Россия, Москва
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