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Flow of high-energy positive oxygen ions from plasma onto the substrate in a pulsed magnetron discharge with a hot target.
- Authors: Kolodko D.V.1,2,3, Kaziev A.V.2, Ageichenkov D.G.2, Lisenkov V.Y.2
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Affiliations:
- Kotelnikov Institute of Radioengineering and Electronics, Russian Academy of Sciences, Fryazino Branch
- National Research Nuclear University Moscow Engineering Physics Institute
- P.N. Lebedev Physical Institute Russian Academy of Sciences
- Issue: Vol 68, No 10 (2023)
- Pages: 1040-1042
- Section: ФИЗИЧЕСКИЕ ПРОЦЕССЫ В ЭЛЕКТРОННЫХ ПРИБОРАХ
- URL: https://journal-vniispk.ru/0033-8494/article/view/232593
- DOI: https://doi.org/10.31857/S0033849423100078
- EDN: https://elibrary.ru/DPCDQT
- ID: 232593
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Abstract
A group of high-energy positive O^+ ions was detected in a plasma flow
high-current pulsed magnetron discharge with a hot target in an Ar/O_2 gas mixture. The mechanism for the formation of accelerated O^+ ions may be the conversion of accelerated ones in the cathode layer of negative ions O^– → O^+ in the processes of charge exchange or ionization by electron impact.
About the authors
D. V. Kolodko
Kotelnikov Institute of Radioengineering and Electronics, Russian Academy of Sciences, Fryazino Branch; National Research Nuclear University Moscow Engineering Physics Institute; P.N. Lebedev Physical Institute Russian Academy of Sciences
Email: dobrynya_kol@mail.ru
Fryazino, Moscow oblast, 141190 Russia; Moscow, 115409 Russia; Moscow, 119991, Russia
A. V. Kaziev
National Research Nuclear University Moscow Engineering Physics Institute
Email: dobrynya_kol@mail.ru
Moscow, 115409 Russia
D. G. Ageichenkov
National Research Nuclear University Moscow Engineering Physics Institute
Email: dobrynya_kol@mail.ru
Moscow, 115409 Russia
V. Yu. Lisenkov
National Research Nuclear University Moscow Engineering Physics Institute
Author for correspondence.
Email: dobrynya_kol@mail.ru
Moscow, 115409 Russia
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