电邮这篇文章 DIFFUSION OF HYDROGEN ATOMS FROM Si3N4 DIELECTRIC SUBSTRATES INTO AMORPHOUS AND POLYCRYSTALLINE Si AND Ge FILMS
- 作者: Arapkina L.V.1, Chizh K.V.1, Stavrovskiy D.B.1, Dubkov V.P.1, Storozhevykh M.S.1, Yur'ev V.A.1
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隶属关系:
- A. M. Prokhorov General Physics Institute of the Russian Academy of Sciences
- 期: 卷 165, 编号 5 (2024)
- 页面: 647-654
- 栏目: Articles
- URL: https://journal-vniispk.ru/0044-4510/article/view/259025
- DOI: https://doi.org/10.31857/S0044451024050043
- ID: 259025
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详细
The results of RHEED and FTIR investigation of polycrystalline and amorphous Si and Ge films deposited on dielectric Si3N4/SiO2/Si (001) substrates are presented. A decrease in the intensity of the IR absorption bands of N–H vibrations in the Si3N4 layers is observed, which is associated with the migration of H atoms from Si3N4 into the growing Si and Ge films. This transfer occurs at 30 ◦C and increases with increasing temperature (30–500 ◦C) and Si (Ge) film thickness (50–200 nm). We consider the experimental results within the framework of a model based on the assumption that the migration of hydrogen atoms from the dielectric Si3N4 into the growing Si and Ge films is controlled by the difference in chemical potentials of hydrogen atoms in the dielectric layer and the Si(Ge) film and is not related to thermal diffusion. This process occurs only during the growth of Si and Ge films and is interrupted with the cessation of growth and the alignment of chemical potential levels.
作者简介
L. Arapkina
A. M. Prokhorov General Physics Institute of the Russian Academy of Sciences
Email: arapkina@kapella.gpi.ru
俄罗斯联邦, 38 Vavilov Street, Moscow, 119991
K. Chizh
A. M. Prokhorov General Physics Institute of the Russian Academy of Sciences
Email: arapkina@kapella.gpi.ru
俄罗斯联邦, 38 Vavilov Street, Moscow, 119991
D. Stavrovskiy
A. M. Prokhorov General Physics Institute of the Russian Academy of Sciences
Email: arapkina@kapella.gpi.ru
俄罗斯联邦, 38 Vavilov Street, Moscow, 119991
V. Dubkov
A. M. Prokhorov General Physics Institute of the Russian Academy of Sciences
Email: arapkina@kapella.gpi.ru
俄罗斯联邦, 38 Vavilov Street, Moscow, 119991
M. Storozhevykh
A. M. Prokhorov General Physics Institute of the Russian Academy of Sciences
Email: arapkina@kapella.gpi.ru
俄罗斯联邦, 38 Vavilov Street, Moscow, 119991
V. Yur'ev
A. M. Prokhorov General Physics Institute of the Russian Academy of Sciences
编辑信件的主要联系方式.
Email: arapkina@kapella.gpi.ru
俄罗斯联邦, 38 Vavilov Street, Moscow, 119991
参考
- B. J. Hallam, P. G. Hamer, A. M. C. Wenham, C. E. Chan, B. V. Stefani, and S. Wenham, Prog. Photovolt. Res. Appl. 1, 1217 (2020).
- W. Soppe, H. Rieffe, and A. Weeber, Prog. Photovolt. Res. Appl. 13, 551 (2005).
- R. S. Bonilla, B. Hoex, P. Hamer, and P. R. Wilshaw, Phys. Stat. Sol. (a) 214, 1700293 (2017).
- M. Z. Rahman, Renew. Sustain. Energy Rev. 30, 734 (2014).
- A. G. Aberle, Sol. Energy Mater. Sol. Cells 65, 239 (2001).
- J. Z. Xie, S. P. Murarka, X. S. Guo, and W. A. Lanford, J. Vac. Sci. Technol. B 7, 150 (1989).
- P. S. Peercy, H. J. Stein, B. L. Doyle, and S. T. Picraux, J. Electron. Mater. 8, 11 (1979).
- C. Boehme and G. Lucovsky, J. Appl. Phys. 88, 6055 (2000).
- W. Beyer, Phys. Stat. Sol. (a) 213, 1661 (2016).
- W. Beyer, Sol. Energy Mater. Sol. Cells 78, 235 (2003).
- C. G. V. D. Walle and R. A. Street, Mat. Res. Soc. Symp. Proc. 377, 389 (1995).
- J. Robertson, Phil. Mag. B 69, 307 (1994).
- R. A. Street, Phys. Rev. B 43, 2454 (1991).
- P. V. Santos, N. M. Johnson, R. A. Street, M. Hack, R. Thompson, and C. C. Tsai, Phys. Rev. B 47, 10244 (1993).
- W. B. Jackson and C. C. Tsai, Phys. Rev. B 45, 6564 (1992).
- S. C. Deane and M. J. Powell, J. Non-Cryst. Sol. 198200, 295 (1996).
- К. В. Чиж, Л. В. Арапкина, В. П. Дубков, Д. Б. Ставровский, В. А. Юрьев, М. С. Сторожевых, Автометрия 58, 79 (2022).
- P. Paduschek and P. Eichinger, Appl. Phys. Lett. 36, 62 (1980).
- H. J. Stein, J. Electron. Mater. 5, 161 (1976).
- K.V. Chizh, L.V. Arapkina, D.B. Stavrovsky, P. I. Gaiduk, and V. A. Yuryev, Mater. Sci. Semicond. Process. 99, 78 (2019).
- L. V. Arapkina, K. V. Chizh, D. B. Stavrovskii, V. P. Dubkov, E. P. Lazareva, and V. A. Yuryev, Sol. Energy Mater. Sol. Cells 230, 111231 (2021).
- M. S. Storozhevykh, V. P. Dubkov, L. V. Arapkina, K. V. Chizh, S. A. Mironov, V. A. Chapnin, and V. A. Yuryev, Proc. SPIE 10248, 102480O (2017).
- D. Davazoglou and V. E. Vamvakas, J. Electrochem. Soc. 150, F90 (2003).
- E. A. Taft, J. Electrochem. Soc. 118, 1341 (1971).
- W. Beyer, J. Herion, H. Wagner, and U. Zastrow, Phil. Mag. B 63, 269 (1991).
- A. Van Wieringen and N. Warmoltz, Physica 22, 849 (1956).
- Y. L. Huang, Y. Ma, R. Job, and A. G. Ulyashin, J. Appl. Phys. 96, 7080 (2004).
- W. Beyer, J. Non-Cryst. Sol. 198-200, 40 (1996).
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