Growth characteristics, phase composition and optical properties of Ti–Sc–O thin films synthesized by atomic layer deposition

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Abstract

Ti–Sc–O thin films were synthesized at 300°C by atomic layer deposition (ALD) via alternating between the reaction cycles with metal precursors and H2O as co-reactant. By varying the cycle ratio, the materials of [Sc]/([Ti] + [Sc]) = 13, 25, 44, 64, 82% were obtained. The films were examined via spectral and single wave null ellipsometry, X-ray photoelectron spectroscopy, scanning electron microscopy and X-ray diffraction. The formation of the material was demonstrated to be substrate-inhibited and to occur within the “temperature window” of ALD. As a result of Ti2p and Sc2p XPS spectra analysis, the oxidation states of the metals are Ti4+ and Sc3+. At low Sc concentrations (up to [Sc]/([Ti] + [Sc]) = 25%) the film crystallization into anatase phase observed for individual TiO2 film is suppressed. In the range of [Sc]/([Ti] + [Sc]) = 44–100% the materials of various cubic crystal structure types are formed: with the increase of scandium concentration the structure changes from disordered fluorite Sc4Ti3O12 to cubic Sc2O3-based solid solution. The refractive indices n(E), extinction coefficients k(E) and optical bandgap values are well described by the Tauc-Lorentz model. They vary between the corresponding parameters of the individual oxides depending on the composition, which is relevant for current problems of optics, photonics, solar energy and photocatalysis.

About the authors

D. E Petukhova

Nikolaev Institute of Inorganic Chemistry of SB RAS

Email: petukhova@niic.nsc.ru
Novosibirsk, Russia

I. V Korolkov

Nikolaev Institute of Inorganic Chemistry of SB RAS

Novosibirsk, Russia

A. A Saraev

Boreskov Institute of Catalysis of SB RAS

Novosibirsk, Russia

M. S Lebedev

Nikolaev Institute of Inorganic Chemistry of SB RAS

Novosibirsk, Russia

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