Surface Relief Forming on Optical Ceramic Articles by Laser Pyrolysis of Organosilicon Materials

Abstract

This is devoted to the development of technology for forming the required microrelief of the optical surfaces of glass-ceramic substrates. It is shown that the problem can be solved by using controlled local deposition of silicon dioxide coatings on the surface by laser pyrolysis of tetraethoxysilane vapor in the presence of ozone. The characteristics of the experimental samples are presented and are compared with data obtained from mathematical modeling of the results of technological processes. It is shown that the developed technology can be used to profile substrates with large radii of curvature by successive deposition of multifilm coatings of interference spherical mirrors.