Email this article Calibration of Scanning Electron Microscopes over a Wide Range of Magnifications
- Authors: Kirtaev R.V.1,2, Kuzin A.Y.3, Maslov V.G.1, Mityukhlyaev V.B.1, Todua P.A.1,2, Filippov M.N.1,2,4
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Affiliations:
- Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
- Moscow Institute of Physics and Technology (State University)
- All-Russia Research Institute of Metrological Service (VNIIMS)
- Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IGIC RAS)
- Issue: Vol 59, No 12 (2017)
- Pages: 1245-1249
- Section: Article
- URL: https://journal-vniispk.ru/0543-1972/article/view/245998
- DOI: https://doi.org/10.1007/s11018-017-1123-5
- ID: 245998
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Abstract
A new method is proposed for calibrating scanning electron microscopes (SEM) with magnification in the 10–50000× range using an end gauge and an auxiliary structure. Use of a certified end gauge ensures traceability of the calibration results to the primary standard for the meter. The relative expanded uncertainty of measurements on an S-4800 SEM at magnifications of 1000, 10000, and 50000× is less than 0.14%.
About the authors
R. V. Kirtaev
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV); Moscow Institute of Physics and Technology (State University)
Author for correspondence.
Email: fgupnicpv@mail.ru
Russian Federation, Moscow; Dolgoprudnyi, Moscow Region
A. Yu. Kuzin
All-Russia Research Institute of Metrological Service (VNIIMS)
Email: fgupnicpv@mail.ru
Russian Federation, Moscow
V. G. Maslov
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Email: fgupnicpv@mail.ru
Russian Federation, Moscow
V. B. Mityukhlyaev
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV)
Email: fgupnicpv@mail.ru
Russian Federation, Moscow
P. A. Todua
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV); Moscow Institute of Physics and Technology (State University)
Email: fgupnicpv@mail.ru
Russian Federation, Moscow; Dolgoprudnyi, Moscow Region
M. N. Filippov
Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV); Moscow Institute of Physics and Technology (State University); Institute of General and Inorganic Chemistry, Russian Academy of Sciences (IGIC RAS)
Email: fgupnicpv@mail.ru
Russian Federation, Moscow; Dolgoprudnyi, Moscow Region; Moscow
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