Measurements of Movements of Micro-Objects by the Heterodyne Method

Abstract

A block diagram of a device for measuring the movement of micro-objects by the heterodyne method has been developed. Analytic expressions are obtained for calculating the signal power on the photodetector, the periods of interference patterns, the measuring range, the maximum distance to the object, the minimum object displacement, the measurement accuracy, which made it possible to determine the main parameters of the device.