Production Process Control Subsystem for Manufacture of Integrated Circuits

I. Ya. Lvovich; Ya. E. Lvovich; A. P. Preobrazhenskiy; O. N. Choporov; D. V. Saleev

doi:10.1007/s11018-017-1227-y

Production Process Control Subsystem for Manufacture of Integrated Circuits

Authors: Lvovich I.Y.¹, Lvovich Y.E.², Preobrazhenskiy A.P.², Choporov O.N.³, Saleev D.V.²
Affiliations:
1. Pan-European University
2. Voronezh High Technology Institute
3. Voronezh State Technical University
Issue: Vol 60, No 6 (2017)
Pages: 529-533
Section: Article
URL: https://journal-vniispk.ru/0543-1972/article/view/246179
DOI: https://doi.org/10.1007/s11018-017-1227-y
ID: 246179

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Abstract

Problems related to the organization of the process of manufacturing integrated circuits are considered. A production process control subsystem for the manufacture of trial lots of integrated circuits for further organization of batch production is developed. The use of a module for optimization of production processes for the purpose of constructing a mathematical model that takes into account cause-effect relationships between the quality indicators of the elements of the system is proposed.