Effect of deviations from the (0001) plane of sapphire on the surface properties

Abstract

The stability of the physicochemical properties of the (0001) plane of sapphire is largely determined by the accuracy of its orientation. It is shown that at a deviation of the surface from the (0001) plane by 4°, the wear rate increases by 13–22%, the corrosion resistance decreases by a factor of 1.4, thus enabling the rate of chemical mechanical polishing to grow up to 2.3 times.