Using electron backscatter diffraction to investigate the influence of mechanical polishing on the state of the surface of diamond
- Authors: Korostylev E.V.1, Bormashov V.S.1,2, Tarelkin S.A.1,2, Doronin M.A.2
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Affiliations:
- Moscow Institute of Physics and Technology
- Technological Institute for Superhard and Novel Carbon Materials
- Issue: Vol 11, No 1 (2017)
- Pages: 125-129
- Section: Article
- URL: https://journal-vniispk.ru/1027-4510/article/view/191154
- DOI: https://doi.org/10.1134/S1027451017010141
- ID: 191154
Cite item
Abstract
Electron backscatter diffraction is used to determine the influence of mechanical polishing on the surface state of a two-layer structure made from diamond. It is found that the process of polishing does not lead to significant degradation of the surface, while the thickness of the amorphous layer formed due to polishing does not exceed a few atomic layers.
About the authors
E. V. Korostylev
Moscow Institute of Physics and Technology
Author for correspondence.
Email: golavl.itachi@gmail.com
Russian Federation, Dolgoprudny, Moscow oblast, 141700
V. S. Bormashov
Moscow Institute of Physics and Technology; Technological Institute for Superhard and Novel Carbon Materials
Email: golavl.itachi@gmail.com
Russian Federation, Dolgoprudny, Moscow oblast, 141700; Troitsk, Moscow, 142190
S. A. Tarelkin
Moscow Institute of Physics and Technology; Technological Institute for Superhard and Novel Carbon Materials
Email: golavl.itachi@gmail.com
Russian Federation, Dolgoprudny, Moscow oblast, 141700; Troitsk, Moscow, 142190
M. A. Doronin
Technological Institute for Superhard and Novel Carbon Materials
Email: golavl.itachi@gmail.com
Russian Federation, Troitsk, Moscow, 142190
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