Complex analysis of microparticles deposited from arc-discharge plasma on vacuum-chamber walls

Abstract

A complex study of the microparticles and condensate in the form of films deposited from an arcplasma flow on vacuum-chamber walls is performed. The study includes determination of the chemical and phase composition of the particles, their morphology, differential thermal analysis, electron microscopy, and also electron paramagnetic resonance and infrared spectroscopy. The plasma flow propagates in electric and magnetic fields. The formed structures are a result of the interaction of particles emitted from the cathode spot. In this case, the formation and existence of current layers in the plasma flow are assumed. The retrograde rotation of the cathode spot and plasma flow are analyzed. The conditions for the formation of fractal structures from plasma are determined.