The effect of bombardment with neutralized neon ions on the roughness of a fused silica and beryllium surface
- Authors: Zorina M.V.1, Mikhaylenko M.S.1, Pariev D.E.1, Pestov A.E.1, Salashchenko N.N.1, Strulya I.L.1,2, Churin S.A.1,3, Chkhalo N.I.1
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Affiliations:
- Institute for Physics of Microstructures
- OAO “Kompozit”
- Lobachevsky State University of Nizhny Novgorod
- Issue: Vol 11, No 3 (2017)
- Pages: 485-489
- Section: Article
- URL: https://journal-vniispk.ru/1027-4510/article/view/192922
- DOI: https://doi.org/10.1134/S102745101703017X
- ID: 192922
Cite item
Abstract
The effect of Ne ion beam etching on the roughness of materials for optical substrates—fused silica and beryllium—is studied. It is shown that the treatment of a fused silica surface by neutralized Ne ions with an energy of 400–800 eV makes it possible to smooth roughnessed in the range of higher spatial frequencies of 3–63 μm–1 at an incidence angle of 0°–30°. For beryllium, the possibility of smoothing the surface roughness at an ion energy of 400 eV is found.
Keywords
About the authors
M. V. Zorina
Institute for Physics of Microstructures
Email: aepestov@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 607680
M. S. Mikhaylenko
Institute for Physics of Microstructures
Email: aepestov@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 607680
D. E. Pariev
Institute for Physics of Microstructures
Email: aepestov@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 607680
A. E. Pestov
Institute for Physics of Microstructures
Author for correspondence.
Email: aepestov@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 607680
N. N. Salashchenko
Institute for Physics of Microstructures
Email: aepestov@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 607680
I. L. Strulya
Institute for Physics of Microstructures; OAO “Kompozit”
Email: aepestov@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 607680; Korolev, Moscow oblast, 141070
S. A. Churin
Institute for Physics of Microstructures; Lobachevsky State University of Nizhny Novgorod
Email: aepestov@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 607680; Nizhny Novgorod, 603950
N. I. Chkhalo
Institute for Physics of Microstructures
Email: aepestov@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 607680
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