Email this article Application of cluster beams for the physics and technologies of microstructures
- Authors: Nechay A.N.1, Salashchenko N.N.1, Chkhalo N.I.1
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Affiliations:
- Institute for Physics of Microstructures
- Issue: Vol 11, No 3 (2017)
- Pages: 496-500
- Section: Article
- URL: https://journal-vniispk.ru/1027-4510/article/view/192933
- DOI: https://doi.org/10.1134/S1027451017030120
- ID: 192933
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Abstract
The paper presents a brief review of the possible applications of cluster beams for emission in the short-wavelength region for the treatment of ultrasmooth surfaces and the fabrication of nanostructures. An experimental device which is under development is described in brief, and its calculated characteristics are presented. The issues that can be resolved by means of this device are outlined.
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About the authors
A. N. Nechay
Institute for Physics of Microstructures
Author for correspondence.
Email: nechay@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 603950
N. N. Salashchenko
Institute for Physics of Microstructures
Email: nechay@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 603950
N. I. Chkhalo
Institute for Physics of Microstructures
Email: nechay@ipm.sci-nnov.ru
Russian Federation, Nizhny Novgorod, 603950
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