Comparative analysis of methods for measurement of the surface potential of dielectrics charging under electron-beam irradiation in a scanning electron microscope

Abstract

A concise critical analysis of possible methods for measuring the suface potentials of dielectric targets under medium-energy electron-beam irradiation in a scanning electron microscope is carried out. The advantages of studying charging kinetics by recording a shift in the entire energy spectrum of emitted electrons are shown. Two new methods of surface-potential estimation are proposed: using the cathodoluminescence signal and the signal of backscattered electrons. It is found that the total energy of electrons reflected from charged dielectric targets is several times greater than the energy of electrons reflected from an uncharged dielectric.