Email this article Principles of the Construction and Computer Simulation of a Source of Homogeneous and Heterogeneous Cluster Ions
- Authors: Belykh S.F.1, Bekkerman A.D.2, Tolstogouzov A.B.3,4, Lozovan A.A.1, Fu D.J.5
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Affiliations:
- Moscow Aviation Institute (National Research University)
- Schulich Faculty of Chemistry
- Centre for Physics and Technological Research, Dept. de Física da Faculdade de Ciências e Tecnologia
- Ryazan State Radio Engineering University
- Key Laboratory of Artificial Micro- and Nano-Materials of the Ministry of Education, School of Physics and Technology
- Issue: Vol 12, No 1 (2018)
- Pages: 33-37
- Section: Article
- URL: https://journal-vniispk.ru/1027-4510/article/view/194717
- DOI: https://doi.org/10.1134/S1027451018010056
- ID: 194717
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Abstract
The principles of constructing a sputtering-type high-current source of homogeneous and heterogeneous cluster ions are comprehensively analyzed. The results of analysis are used to perform computer simulation of the given source. The ion-optical scheme and structural model of a new cluster ion source are developed.
About the authors
S. F. Belykh
Moscow Aviation Institute (National Research University)
Author for correspondence.
Email: serolg@rambler.ru
Russian Federation, Moscow, 109383
A. D. Bekkerman
Schulich Faculty of Chemistry
Email: serolg@rambler.ru
Israel, Haifa, 32000
A. B. Tolstogouzov
Centre for Physics and Technological Research, Dept. de Física da Faculdade de Ciências e Tecnologia; Ryazan State Radio Engineering University
Email: serolg@rambler.ru
Portugal, Caparica, 2829-516; Ryazan, 390005
A. A. Lozovan
Moscow Aviation Institute (National Research University)
Email: serolg@rambler.ru
Russian Federation, Moscow, 109383
D. J. Fu
Key Laboratory of Artificial Micro- and Nano-Materials of the Ministry of Education, School of Physics and Technology
Email: serolg@rambler.ru
China, Wuhan, 430072
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