Diagnostics of the Phase Composition of Lead-Zirconate-Titanate Films by Raman Spectroscopy

Abstract

The problem of diagnostics of the phase composition of lead-zirconate-titanate (PZT) layers under conditions of overlapped Raman spectra is solved by means of applied mathematical statistics. The spectra measured on the surface of the multiphase material are treated as points in multidimensional vector spaces. Particular attention is paid to narrowing of the spectral range where the analysis is carried out. For this purpose, regions for the first principal components are used, where the greatest relative changes are observed. The concentration of the perovskite and pyrochlore phases in the growing PZT films is determined.