Ion—Electron Recombination and Heat Fluxes in High-Frequency Ion Sources

Abstract

Heat fluxes escaping from plasma to the surfaces of construction components of an ion source with perforated electrodes of an ion-optical system are considered. The heat flux from ion—electron recombination on surfaces adjoining the plasma is introduced into our consideration taking into account the spatial distribution of the recombination radiation and coefficients of radiation reflection from the surfaces. Corrected expressions for heat fluxes which can be used as boundary conditions in numerical models for calculating the temperatures in ion sources with high-frequency plasma discharge are given.