Test Object for SEM Calibration: 2. Correlation Analysis of SEM Signals

Abstract

A method for correlation analysis of the coordinates of control points in scanning electron microscope signals obtained by recording slow secondary electrons is described. The method allows one to independently and quantitatively estimate the fabrication quality of the relief components of test objects with a trapezoidal profile and large inclination angles of the lateral walls, which are intended for the calibration of a scanning electron microscope, and to choose only the components or separate areas of components with a high quality of their fabrication for the purpose of calibration. Correlation analysis of the quality of fabrication of the MShPS-2.0Si test object is performed. Analysis shows that the used microscopes (with real and usually unknown drawbacks) allow one to investigate the advantages and disadvantages both of real test objects with a trapezoidal profile and large inclination angles of the lateral walls, and of real scanning electron microscopes.