On the Effect of the Crystal Structure in the Sputtering of Two-Component Single-Crystal Structures

Abstract

The transmission sputtering of component atoms under ion bombardment of the (0001) face of a two-component VSi₂ single crystal is studied using molecular-dynamics computer simulation. The sputtering of component atoms is calculated in the case of the sputtering of virtual \({\text{VV}}_{2}^{'}\) and Si'Si₂ single crystals consisting of atoms with the same masses, and the following new effect in the selective sputtering is studied: atoms from vanadium sites are preferentially transmission sputtered in the case of the same masses and binding energies of component atoms. This effect can be called the effect of nonidentity of the component sites in the complex VSi₂ lattice (of the C40 type) with respect to the momentum propagation in collision cascades, i.e., the effect of structure in the selective sputtering of two-component single crystal targets.