Sizing the EUV Laser-Plasma Source for a Microscope - PDF (Russian)
Copyright (c) 2023 Д.Г. Реунов, И.В. Малышев, А.А. Перекалов, А.Н. Нечай, Н.И. Чхало
Copyright (c) 2023 Д.Г. Реунов, И.В. Малышев, А.А. Перекалов, А.Н. Нечай, Н.И. Чхало
ISSN 1028-0960 (Print)
ISSN 3034-5731 (Online)
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Keywords
X-ray diffraction
X-ray phase analysis
X-ray photoelectron spectroscopy
atomic force microscopy
electron microscopy
ion implantation
irradiation
magnetron sputtering
microstructure
nanoparticles
neutron reflectometry
phase composition
scanning electron microscopy
silicon
structure
surface
surface morphology
synchrotron radiation
thin films
transmission electron microscopy
zinc oxide
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Keywords
X-ray diffraction
X-ray phase analysis
X-ray photoelectron spectroscopy
atomic force microscopy
electron microscopy
ion implantation
irradiation
magnetron sputtering
microstructure
nanoparticles
neutron reflectometry
phase composition
scanning electron microscopy
silicon
structure
surface
surface morphology
synchrotron radiation
thin films
transmission electron microscopy
zinc oxide
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Copyright (c) 2023 Д.Г. Реунов, И.В. Малышев, А.А. Перекалов, А.Н. Нечай, Н.И. Чхало