Nonlinear thickness-stretch vibration of thin-film acoustic wave resonators

Abstract

We perform a theoretical analysis on nonlinear thickness-stretch free vibration of thin-film acoustic wave resonators made from AlN and ZnO. The third-order or cubic nonlinear theory by Tiersten is employed. Using Green’s identify, under the usual approximation of neglecting higher time harmonics, a perturbation analysis is performed from which the resonator frequency-amplitude relation is obtained. Numerical calculations are made. The relation can be used to determine the linear operating range of these resonators. It can also be used to compare with future experimental results to determine the relevant thirdand/or fourth-order nonlinear elastic constants.