Numerical Investigation of Quasi-Lamb Modes in C‑Tilted ZnO/SiC Composite Membrane for High Performance Pressure Micro-Sensor

Abstract

Using the finite element method, we have studied the Lamb modes characteristics propagation in c‑tilted ZnO/SiC thin film composite membrane. Phase velocity dispersion curves, electromechanical coupling factors and the mass loading effect on the fundamental quasi Lamb modes are theoretically investigated for different rotating angle (0°, θ°, 90°), θ being the angle of rotation, and for different h_ZnO/λ values. To develop high performance pressure micro-sensor based on thin film piezoelectric ZnO on amorphous SiC (range 0.1 to 100 Pa) the anti-symmetric fundamental qA₀ mode phase shift is studied for pressure sensing.