Email this article X-ray diffraction characterization of epitaxial CVD diamond films with natural and isotopically modified compositions
- Authors: Prokhorov I.A.1, Voloshin A.E.2, Ralchenko V.G.3,4, Bolshakov A.P.3,4, Romanov D.A.5, Khomich A.A.3,6, Sozontov E.A.7
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Affiliations:
- Space Materials Science Laboratory, Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics”, Kaluga Branch
- Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics”
- Prokhorov General Physics Institute
- National Research Nuclear University “MEPhI”
- Bauman Moscow State Technical University, Kaluga Branch
- Institute of Radio Engineering and Electronics, Fryazino Branch
- National Research Centre “Kurchatov Institute”
- Issue: Vol 61, No 6 (2016)
- Pages: 979-986
- Section: Real Structure of Crystals
- URL: https://journal-vniispk.ru/1063-7745/article/view/190403
- DOI: https://doi.org/10.1134/S1063774516060122
- ID: 190403
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Abstract
Comparative investigations of homoepitaxial diamond films with natural and modified isotopic compositions, grown by chemical vapor deposition (CVD) on type-Ib diamond substrates, are carried out using double-crystal X-ray diffractometry and topography. The lattice mismatch between the substrate and film is precisely measured. A decrease in the lattice constant on the order of (Δa/a)relax ∼ (1.1–1.2) × 10–4 is recorded in isotopically modified 13С (99.96%) films. The critical thicknesses of pseudomorphic diamond films is calculated. A significant increase in the dislocation density due to the elastic stress relaxation is revealed by X-ray topography.
About the authors
I. A. Prokhorov
Space Materials Science Laboratory, Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics”, Kaluga Branch
Author for correspondence.
Email: igor.prokhorov@mail.ru
Russian Federation, Kaluga, 248640
A. E. Voloshin
Shubnikov Institute of Crystallography, Federal Scientific Research Centre “Crystallography and Photonics”
Email: igor.prokhorov@mail.ru
Russian Federation, Moscow, 119333
V. G. Ralchenko
Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”
Email: igor.prokhorov@mail.ru
Russian Federation, Moscow, 119991; Moscow, 115409
A. P. Bolshakov
Prokhorov General Physics Institute; National Research Nuclear University “MEPhI”
Email: igor.prokhorov@mail.ru
Russian Federation, Moscow, 119991; Moscow, 115409
D. A. Romanov
Bauman Moscow State Technical University, Kaluga Branch
Email: igor.prokhorov@mail.ru
Russian Federation, Kaluga, 248000
A. A. Khomich
Prokhorov General Physics Institute; Institute of Radio Engineering and Electronics, Fryazino Branch
Email: igor.prokhorov@mail.ru
Russian Federation, Moscow, 119991; Fryazino, Moscow oblast, 141190
E. A. Sozontov
National Research Centre “Kurchatov Institute”
Email: igor.prokhorov@mail.ru
Russian Federation, Moscow, 123182
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