Features of Wavelet Analysis in X-Ray Reflectometry of Thin Films

Abstract

Specific features of the use of wavelet transform for estimating the thickness of layers and their order in a film density profile based on X-ray and synchrotron reflectometry data are considered. Some ways are proposed to reveal the characteristic features of Langmuir film packing by constructing a wavelet transform for the corresponding reflectograms. Dependences of the X-ray attenuation length on the grazing incidence angle are plotted by an example of multilayered box model of film profile; these dependences demonstrate possibilities of mapping the spatial signal delay (which occurs when rays are reflected from layers of different density) in a waveletgram.