Effective Charge in LiNbO3 Films Fabricated by Radio-Frequency Magnetron Sputtering Method

Abstract

Amorphous Li–Nb–O films were deposited onto Si substrates by radio-frequency magnetron sputtering method. The fabricated heterostructures demonstrated the presence of effective oxide charge Q_eff having both negative and positive components. Thermal annealing (TA) of as-grown heterostructures leads to the crystallization of a Li–Nb–O system with the formation of LiNbO₃ films. The Q_eff changes with TA, reaching a minimum at the annealing temperature of about 470°C, corresponding to the entire film’s crystallization.