Отправить статью по E-mail Numerical simulation of the ablation of thin molybdenum films under laser irradiation
- Авторы: Kazanskiy N.L.1,2, Poletayev S.D.1,2
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Учреждения:
- Image Processing Systems Institute of RAS—Branch of the FSRC “Crystallography and Photonics”
- Samara National Research University
- Выпуск: Том 61, № 9 (2016)
- Страницы: 1279-1285
- Раздел: Theoretical and Mathematical Physics
- URL: https://journal-vniispk.ru/1063-7842/article/view/197919
- DOI: https://doi.org/10.1134/S1063784216090127
- ID: 197919
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Аннотация
Laser irradiation of a molybdenum film on a quartz substrate is numerically studied. The simulated results prove the experimental effect lying in a threefold decrease in the size of the ablation region in comparison with the focal spot. The numerical experiment proves the hypothesis on the two-stage ablation of metal film with the primary formation of oxide phase. It is demonstrated that oxidation leads to a selective decrease in the thermal resistance of the film along the vertical direction, so that the anisotropic character of the ablation is enhanced.
Об авторах
N. Kazanskiy
Image Processing Systems Institute of RAS—Branch of the FSRC “Crystallography and Photonics”; Samara National Research University
Email: sergpolet@gmail.com
Россия, Molodogvardeiskaya st. 151, Samara, 443001; Moskovskoe sh. 34, Samara, 443086
S. Poletayev
Image Processing Systems Institute of RAS—Branch of the FSRC “Crystallography and Photonics”; Samara National Research University
Автор, ответственный за переписку.
Email: sergpolet@gmail.com
Россия, Molodogvardeiskaya st. 151, Samara, 443001; Moskovskoe sh. 34, Samara, 443086
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