Numerical simulation of the ablation of thin molybdenum films under laser irradiation


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Abstract

Laser irradiation of a molybdenum film on a quartz substrate is numerically studied. The simulated results prove the experimental effect lying in a threefold decrease in the size of the ablation region in comparison with the focal spot. The numerical experiment proves the hypothesis on the two-stage ablation of metal film with the primary formation of oxide phase. It is demonstrated that oxidation leads to a selective decrease in the thermal resistance of the film along the vertical direction, so that the anisotropic character of the ablation is enhanced.

About the authors

N. L. Kazanskiy

Image Processing Systems Institute of RAS—Branch of the FSRC “Crystallography and Photonics”; Samara National Research University

Email: sergpolet@gmail.com
Russian Federation, Molodogvardeiskaya st. 151, Samara, 443001; Moskovskoe sh. 34, Samara, 443086

S. D. Poletayev

Image Processing Systems Institute of RAS—Branch of the FSRC “Crystallography and Photonics”; Samara National Research University

Author for correspondence.
Email: sergpolet@gmail.com
Russian Federation, Molodogvardeiskaya st. 151, Samara, 443001; Moskovskoe sh. 34, Samara, 443086

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