Atomic Force Microscopy Measurement of the Resistivity of Semiconductors
- Autores: Smirnov V.A.1, Tominov R.V.1, Alyab’eva N.I.2, Il’ina M.V.1, Polyakova V.V.1, Bykov A.V.1, Ageev O.A.1
-
Afiliações:
- Institute of Nanotechnologies, Electronics, and Equipment Engineering
- University of Paris-Sud
- Edição: Volume 63, Nº 8 (2018)
- Páginas: 1236-1241
- Seção: Experimental Instruments and Technique
- URL: https://journal-vniispk.ru/1063-7842/article/view/201882
- DOI: https://doi.org/10.1134/S1063784218080182
- ID: 201882
Citar
Resumo
The surface of silicon substrates has been studied experimentally and theoretically by the method of atomic force microscopy spreading resistance imaging, and measuring techniques for the spreading resistance of semiconductors have been developed based on these data. It has been shown that the resistivity of silicon can be determined reliably if the force with which the probe is pressed against the substrate exceeds some threshold. The influence of the environment on the values of currents in the probe–substrate system has been studied. It has been found that the electrical performance of semiconductors can be properly determined by atomic force microscopy spreading resistance imaging under high-vacuum conditions.
Sobre autores
V. Smirnov
Institute of Nanotechnologies, Electronics, and Equipment Engineering
Autor responsável pela correspondência
Email: vasmirnov@sfedu.ru
Rússia, Taganrog, 347922
R. Tominov
Institute of Nanotechnologies, Electronics, and Equipment Engineering
Email: vasmirnov@sfedu.ru
Rússia, Taganrog, 347922
N. Alyab’eva
University of Paris-Sud
Email: vasmirnov@sfedu.ru
França, Orsay Cedex
M. Il’ina
Institute of Nanotechnologies, Electronics, and Equipment Engineering
Email: vasmirnov@sfedu.ru
Rússia, Taganrog, 347922
V. Polyakova
Institute of Nanotechnologies, Electronics, and Equipment Engineering
Email: vasmirnov@sfedu.ru
Rússia, Taganrog, 347922
Al. Bykov
Institute of Nanotechnologies, Electronics, and Equipment Engineering
Email: vasmirnov@sfedu.ru
Rússia, Taganrog, 347922
O. Ageev
Institute of Nanotechnologies, Electronics, and Equipment Engineering
Email: vasmirnov@sfedu.ru
Rússia, Taganrog, 347922
Arquivos suplementares
