Emission Properties of Laser Plasma Excited on Molecular-Cluster Carbon Dioxide Jets

Abstract

We report on the results of investigation of a gas-jet laser-plasma source of extreme ultraviolet radiation based on a conical supersonic nozzle. As a target, we used molecular-cluster CO₂ jets. Different regimes of the gas flow were obtained by varying the gas parameters at the gas inlet and the influence of these regimes on the emission and technical characteristics of the radiation source was analyzed. It has been shown experimentally that radiation emission is intensified upon an increase in the amount of clustered material in the jet.