Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range

M. M. Barysheva; S. A. Garakhin; S. Yu. Zuev; V. N. Polkovnikov; N. N. Salashchenko; M. V. Svechnikov; R. M. Smertin; N. I. Chkhalo; E. Meltchakov

doi:10.1134/S1063784219110045

Optimization of Composition, Synthesis, and Study of Broadband Multilayer Mirrors for the EUV Spectral Range

Authors: Barysheva M.M.¹, Garakhin S.A.¹, Zuev S.Y.¹, Polkovnikov V.N.¹, Salashchenko N.N.¹, Svechnikov M.V.¹, Smertin R.M.¹, Chkhalo N.I.¹, Meltchakov E.²
Affiliations:
1. Institute for Physics of Microstructures, Russian Academy of Sciences
2. Laboratoire Charles Fabry, Institut d’Optique Graduate School
Issue: Vol 64, No 11 (2019)
Pages: 1673-1679
Section: Article
URL: https://journal-vniispk.ru/1063-7842/article/view/204541
DOI: https://doi.org/10.1134/S1063784219110045
ID: 204541

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Abstract

Broadband Mo/Si and Mo/Be multilayer stack-type mirrors for wavelength intervals of 11.1–13.8, 17–21, and 28–33 nm have been developed and fabricated. Uniform reflection of such structures can be implemented using few corrections of technological process.