Influence of Beryllium Barrier Layers on the Properties of Mo/Si Multilayer Mirrors

S. Yu. Zuev; R. S. Pleshkov; V. N. Polkovnikov; N. N. Salashchenko; M. V. Svechnikov; N. I. Chkhalo; F. Schäfers; M. G. Sertsu; A. Sokolov

doi:10.1134/S1063784219110318

Influence of Beryllium Barrier Layers on the Properties of Mo/Si Multilayer Mirrors

Authors: Zuev S.Y.¹, Pleshkov R.S.¹, Polkovnikov V.N.¹, Salashchenko N.N.¹, Svechnikov M.V.¹, Chkhalo N.I.¹, Schäfers F.², Sertsu M.G.², Sokolov A.²
Affiliations:
1. Institute for Physics of Microstructures, Russian Academy of Sciences
2. Helmholtz-Zentrum Berlin
Issue: Vol 64, No 11 (2019)
Pages: 1688-1691
Section: Article
URL: https://journal-vniispk.ru/1063-7842/article/view/204615
DOI: https://doi.org/10.1134/S1063784219110318
ID: 204615

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Abstract

The performance of multilayer Mo/Si mirrors with B₄C and Be spacers near a wavelength of 13.5 nm has been studied. It has been shown that four-component Mo/Be/Si/B₄C mirrors outperform Mo/Si and Mo/Si/B₄C mirrors in reflection coefficient by 2.0 and 1.3%, respectively. In addition, Mo/Si mirrors offer the widest transmission band width at half maximum (Δλ_1/2 = 0.535 nm). An explanation for these findings has been given.