Characteristics of a localized gas discharge


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The rf capacitive gas discharge with an interelectrode distance of 15–200 µm is studied, and possible forms of its existence are established. The conditions for the formation of discrete microdischarges with a preset geometry, which are localized near some elements of the surfaces of the electrodes, are formulated.

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A. Abramov

Voronezh State University of Architecture and Civil Engineering

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Email: Abramovvgasu@yandex.ru
俄罗斯联邦, ul. 20-letiya Oktyabrya 84, Voronezh, 394006

E. Pankratova

Voronezh State University of Architecture and Civil Engineering

Email: Abramovvgasu@yandex.ru
俄罗斯联邦, ul. 20-letiya Oktyabrya 84, Voronezh, 394006

I. Surovtsev

Voronezh State University of Architecture and Civil Engineering

Email: Abramovvgasu@yandex.ru
俄罗斯联邦, ul. 20-letiya Oktyabrya 84, Voronezh, 394006

D. Zolototrubov

Voronezh State University of Architecture and Civil Engineering

Email: Abramovvgasu@yandex.ru
俄罗斯联邦, ul. 20-letiya Oktyabrya 84, Voronezh, 394006

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