Отправить статью по E-mail Specific features of the laser irradiation of thin molybdenum films
- Авторы: Volkov A.V.1,2, Kazanskiy N.L.1,2, Moiseev O.Y.1, Paranin V.D.2, Poletayev S.D.1,2, Chistyakov I.V.3
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Учреждения:
- Image Processing Systems Institute
- Samara State Aerospace University (National Research University), Samara
- OOO Interlab
- Выпуск: Том 61, № 4 (2016)
- Страницы: 579-583
- Раздел: Physics of Nanostructures
- URL: https://journal-vniispk.ru/1063-7842/article/view/197081
- DOI: https://doi.org/10.1134/S1063784216040241
- ID: 197081
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Аннотация
Laser irradiation of thin molybdenum films with a thickness of less than 100 nm is studied. An experimental hypothesis in accordance with which films of refractory metals can be laser-ablated owing to the formation of an intermediate oxide phase is experimentally proven. A threefold decrease in the thickness of the ablation region under the action of scanning laser radiation is interpreted.
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Об авторах
A. Volkov
Image Processing Systems Institute; Samara State Aerospace University (National Research University), Samara
Email: sergpolet@gmail.com
Россия, Molodogvardeiskaya ul. 151, Samara, 443001; Moskovskoe sh. 34, Samara, 443086
N. Kazanskiy
Image Processing Systems Institute; Samara State Aerospace University (National Research University), Samara
Email: sergpolet@gmail.com
Россия, Molodogvardeiskaya ul. 151, Samara, 443001; Moskovskoe sh. 34, Samara, 443086
O. Moiseev
Image Processing Systems Institute
Email: sergpolet@gmail.com
Россия, Molodogvardeiskaya ul. 151, Samara, 443001
V. Paranin
Samara State Aerospace University (National Research University), Samara
Email: sergpolet@gmail.com
Россия, Moskovskoe sh. 34, Samara, 443086
S. Poletayev
Image Processing Systems Institute; Samara State Aerospace University (National Research University), Samara
Автор, ответственный за переписку.
Email: sergpolet@gmail.com
Россия, Molodogvardeiskaya ul. 151, Samara, 443001; Moskovskoe sh. 34, Samara, 443086
I. Chistyakov
OOO Interlab
Email: sergpolet@gmail.com
Россия, Tikhvinskii per. 11-2, Moscow, 127055
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