Gas-phase synthesis of hexagonal and cubic phases of aluminum nitride: A method and its advantages

V. S. Kudyakova; V. V. Bannikov; A. A. Elagin; R. A. Shishkin; M. V. Baranov; A. R. Beketov

doi:10.1134/S106378501603010X

Gas-phase synthesis of hexagonal and cubic phases of aluminum nitride: A method and its advantages

Authors: Kudyakova V.S.¹, Bannikov V.V.², Elagin A.A.¹, Shishkin R.A.¹, Baranov M.V.¹, Beketov A.R.¹
Affiliations:
1. Ural Federal University
2. Institute of Solid State Chemistry, Ural Branch
Issue: Vol 42, No 3 (2016)
Pages: 260-262
Section: Article
URL: https://journal-vniispk.ru/1063-7850/article/view/197759
DOI: https://doi.org/10.1134/S106378501603010X
ID: 197759

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Abstract

Experimental results obtained in AlN synthesis by the high-temperature gas-phase method and analysis of reaction products phase composition are briefly described. It is demonstrated for the first time that dispersed aluminum nitride can be synthesized by this method from AlF₃ in both hexagonal and cubic modifications.