A diffraction grating created in diamond substrate by boron ion implantation
- Авторлар: Stepanov A.L.1,2,3, Nuzhdin V.I.1, Galyautdinov M.F.1, Kurbatova N.V.1, Valeev V.F.1, Vorobev V.V.2, Osin Y.N.2
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Мекемелер:
- Kazan E.K. Zavoisky Physicotechnical Institute
- Kazan Federal University
- Kazan National Research Technological University
- Шығарылым: Том 43, № 1 (2017)
- Беттер: 104-106
- Бөлім: Article
- URL: https://journal-vniispk.ru/1063-7850/article/view/202803
- DOI: https://doi.org/10.1134/S1063785017010266
- ID: 202803
Дәйексөз келтіру
Аннотация
This work is devoted to new method of manufacturing of diffractive optical elements (gratings). A grating was formed in a diamond substrate by implantation with boron ions through a mask. Ion implantation led to the graphitization of diamond in unmasked regions and resulted in swelling of the irradiated layer. The formation of periodic graphitized surface microstructures on the diamond substrate was confirmed by optical, electron, and atomic force microscopy. The efficiency of operation of the obtained diffractive optical element was demonstrated by probing with He–Ne laser radiation.
Авторлар туралы
A. Stepanov
Kazan E.K. Zavoisky Physicotechnical Institute; Kazan Federal University; Kazan National Research Technological University
Хат алмасуға жауапты Автор.
Email: aanstep@gmail.com
Ресей, Kazan, Tatarstan, 420029; Kazan, Tatarstan, 420008; Kazan, Tatarstan, 420015
V. Nuzhdin
Kazan E.K. Zavoisky Physicotechnical Institute
Email: aanstep@gmail.com
Ресей, Kazan, Tatarstan, 420029
M. Galyautdinov
Kazan E.K. Zavoisky Physicotechnical Institute
Email: aanstep@gmail.com
Ресей, Kazan, Tatarstan, 420029
N. Kurbatova
Kazan E.K. Zavoisky Physicotechnical Institute
Email: aanstep@gmail.com
Ресей, Kazan, Tatarstan, 420029
V. Valeev
Kazan E.K. Zavoisky Physicotechnical Institute
Email: aanstep@gmail.com
Ресей, Kazan, Tatarstan, 420029
V. Vorobev
Kazan Federal University
Email: aanstep@gmail.com
Ресей, Kazan, Tatarstan, 420008
Yu. Osin
Kazan Federal University
Email: aanstep@gmail.com
Ресей, Kazan, Tatarstan, 420008
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