A study of products formed in ablation of single-crystal silicon in aqueous medium under irradiation with nanosecond pulses from fiber-optic ytterbium laser
- Авторы: Veiko V.P.1, Polyakov D.S.1, Skvortsov A.M.1, Chopenko E.S.1
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Учреждения:
- St. Petersburg National Research University of Information Technologies, Mechanics, and Optics
- Выпуск: Том 43, № 5 (2017)
- Страницы: 435-438
- Раздел: Article
- URL: https://journal-vniispk.ru/1063-7850/article/view/204517
- DOI: https://doi.org/10.1134/S1063785017050121
- ID: 204517
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Аннотация
Products formed in laser ablation of single-crystal silicon beneath a water layer under irradiation with nanosecond pulses from a fiber-optic ytterbium laser have been studied. SEM images of structures deposited by dewatering of the colloid solution formed in the course of the ablation are presented. IR spectroscopy and Raman spectroscopy were used to determine their chemical composition and structural features.
Об авторах
V. Veiko
St. Petersburg National Research University of Information Technologies, Mechanics, and Optics
Email: polyakovdmitry1988@gmail.com
Россия, St. Petersburg, 197101
D. Polyakov
St. Petersburg National Research University of Information Technologies, Mechanics, and Optics
Автор, ответственный за переписку.
Email: polyakovdmitry1988@gmail.com
Россия, St. Petersburg, 197101
A. Skvortsov
St. Petersburg National Research University of Information Technologies, Mechanics, and Optics
Email: polyakovdmitry1988@gmail.com
Россия, St. Petersburg, 197101
E. Chopenko
St. Petersburg National Research University of Information Technologies, Mechanics, and Optics
Email: polyakovdmitry1988@gmail.com
Россия, St. Petersburg, 197101
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