A hall microscope for measuring magnetic properties of films

Abstract

A magnetic measuring microscope with a spatial resolution of 3 μm in the determination of current dipole coordinates is described. For the primary transducer, a film Hall transducer with sensitive-zone dimensions of 250 × 400 μm is used. The transducer is positioned at a distance of 3 mm from the plane of scanning. Superresolution as compared to the sensor dimensions and distance from the object was reached by using a priori information about the scanned object. A means of calibration of the magnetic microscope and measurement of its metrological characteristics is proposed. The effectiveness and consistency of the obtained estimate of coordinates is shown by comparison of the random error in measurements of current dipole coordinates with the Cramér–Rao bound. The measuring microscope can be applied in studying elements of functional electronics.